Vertical Cavity Surface Emitting Laser device with integrated tunnel junction

摘要

The invention discloses a Vertical Cavity Surface Emitting Laser (VCSEL) device comprising a first (105) and a second electrical contact (150) and an optical resonator comprising a first (115) and a second Bragg reflector (125) and an active layer (120) for light emission arranged between the distributed Bragg reflectors. One or the other of the distributed Bragg reflectors comprises a first portion (115-1, 125-1) provided with a pair of different refractive index layers and a second portion (115-2, 125-2). ) provided with a pair of different refractive index layers. The first and second parts are characterized by different types of conductivity, and a tunnel junction (130) is arranged between them. The first and second electrical contacts are arranged to electrically pump the optical resonator so that the tunnel junction is inversely polarized during operation of the VCSEL device. The tunnel junction is arranged at an optimized position in the first or second distributed Bragg reflector.