The present invention relates to micromachined reference electrodes, for example, for use in miniaturized electrochemical sensors, and to methods for fabricating such reference electrodes and electrochemical sensors, for example, as a part of a microfluidic system. Electrochemical measurements allow for inexpensive detection of a wide variety of (bio-) chemical compounds in solution. The reference electrode is one of the main parts of an electrochemical cell. The reference electrode, from which no current is drawn, has a stable, constant potential. There are two kinds of electrochemical sensors that need a reference electrode: amperometric sensors and potentiometric sensors.
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