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White-light interferometric measuring device

机译:白光干涉测量仪

摘要

A white-light interferometric measuring device (100) includes: a white light source (106) that emits a white light beam (108); a beam splitter (116) that reflects the white light beam (108); and an interference objective lens (120) that collects the white light beam (108) having reflected off the beam splitter (116) in the direction of an optical axis (0) and irradiates a measurement workpiece (102) with the white light beam (108), the interference objective lens (120) generating interference between a measurement light beam obtained by reflection of the white light beam (108) off the measurement workpiece (102) and a reference light beam obtained by branching of the white light beam (108) to be converged on the measurement workpiece (102). Polarization correcting means (112) that corrects the white light beam (108) to enter the interference objective lens (120) to circularly polarized light is arranged between the white light source (106) and the interference objective lens (120).
机译:白光干涉式测量装置(100)包括:发射白光束(108)的白光源(106);以及发射白光束(108)的白光源。反射白光束(108)的分束器(116);干涉物镜(120),其将在光束分离器(116)上沿光轴(0)的方向反射了的白光束(108)聚光,并向被测物(102)照射( 108),干涉物镜(120)在通过使白光束(108)反射离开测量工件(102)而获得的测量光束与通过分束白光束(108)获得的参考光束之间产生干涉。 )会聚在测量工件(102)上。在白色光源(106)与干涉物镜(120)之间配置有将白光束(108)入射到干涉物镜(120)中的圆偏振光进行修正的偏振光修正装置(112)。

著录项

  • 公开/公告号EP2639546B1

    专利类型

  • 公开/公告日2020-03-04

    原文格式PDF

  • 申请/专利权人 MITUTOYO CORPORATION;

    申请/专利号EP20130158935

  • 发明设计人 USAMI ATSUSHI;NAGAHAMA TATSUYA;

    申请日2013-03-13

  • 分类号G01B9/04;G02B21;G01B9/02;

  • 国家 EP

  • 入库时间 2022-08-21 11:42:02

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