METHOD AND APPARATUS FOR MEASURING LIGHT-SPLITTING PUPIL LASER DIFFERENTIAL MOTION CONFOCAL BRILLOUIN-RAMAN SPECTRUMS

摘要

The present disclosure is to provide a divided-aperture laser differential confocal Brillouin-Raman spectrum measuring method and the device thereof, which belongs to microscopic spectrum imaging field. By using the abandoned Rayleigh scattering light in the traditional confocal Raman spectrum detection, a divided-aperture laser differential confocal microscopy is constructed to realize high resolution imaging of three-dimensional geometrical structure of the measured sample. In addition, the characteristic that the "zero-crossing point" of the divided-aperture laser differential confocal imaging device accurately corresponds to the focus of objective is used to control the spectrum detector to accurately capture the excited Raman spectrum information excited at the focus of the objective, thereby achieving the detection of micro-area geometrical structure and spectrum information of the measured sample with high-spatial resolution, that is achieving "mapping-spectrum" with high-spatial resolution, and balancing resolution and measuring range. By complementing the advantages of confocal Raman spectrum detecting technology and confocal Brillouin spectrum detecting technology, the confocal spectrum detecting solution which detects the Raman spectrum and Brillouin spectrum at the same time is designed, the multi-property parameters of materials are measured and decoupled in composite.