ELECTRON MICROSCOPE WITH IMPROVED IMAGING RESOLUTION

摘要

An Electron Microscope comprising:- A specimen holder, for holding a specimen;- A source, for producing a beam of electrons;- An illumination system, for directing said beam so as to irradiate the specimen;- An elongate beam conduit, through which the beam is directed;- A detector, for detecting radiation emanating from the specimen in response to said irradiation,wherein at least a longitudinal portion of said beam conduit has a composite structure comprising:- An outer tube of electrically insulating material;- An inner skin of electrically conductive material.;In an alternative but related structure, at least a longitudinal portion of said beam conduit is comprised of an aggregate composite material comprising intermixed electrically insulating material and electrically conductive material.