Thin film filter, thin film filter substrate, thin film filter manufacturing method, thin film filter substrate manufacturing method, and MEMS microphone and MEMS microphone manufacturing method.

摘要

PROBLEM TO BE SOLVED: To provide a thin film filter, a thin film filter substrate, a thin film filter manufacturing method, a thin film filter substrate manufacturing method, and a MEMS having a structure in which the pore size is constant and the airflow passing through each hole is directed in a constant direction. Provided are a method for manufacturing a microphone and a MEMS microphone. A thin film filter substrate 2 has a thin film portion 16 having a film surface 16a and a back film surface 16b, and the thin film portion 16 has a plurality of through holes 15 penetrating from the film surface 16a to the back film surface 16b. An inner wall surface 38 with streaks having streaks 37 along the intersecting direction intersecting the film surface 16a is formed inside each through hole 15. [Selection diagram] Fig. 3