Cryogenic refrigerator, cryogenic refrigerator diagnostic device and cryogenic refrigerator diagnostic method

摘要

PROBLEM TO BE SOLVED: To provide a cryogenic refrigerator capable of acquiring measurement data that can be used for diagnosis of a cryogenic refrigerator, and a diagnostic technique of a cryogenic refrigerator based on such measurement data. SOLUTION: A cryogenic refrigerator 10 includes a refrigerator cylinder 16, a pressure switching valve 40 that generates periodic pressure fluctuations in the refrigerator cylinder 16, and refrigeration caused by periodic pressure fluctuations in the refrigerator cylinder 16. A sensor 50 for measuring the periodic deformation of the machine cylinder 16 is provided. The sensor 50 may measure periodic pressure fluctuations in the refrigerator cylinder 16. [Selection diagram] Fig. 1