CRYOGENIC REFRIGERATOR, AND DIAGNOSTIC DEVICE AND DIAGNOSTIC METHOD FOR CRYOGENIC REFRIGERATOR

摘要

A cryogenic refrigerator (10) comprises: a motion transformation mechanism (43) that transforms rotational motion outputted by a motor (42) to rectilinear reciprocating motion of a displacer; a measuring instrument (50) connected to the motor (42) so as to output time series data indicating the power consumed by the motor (42) or the current flowing in the motor (42); and a processing unit (100) that detects wear of sliding surfaces of a first component and a second component of the motion transformation mechanism (43) on the basis of, among the time series data, interval data that includes intake start timing or exhaust start timing.