LOCAL POLISHING PROCESSING METHOD, LOCAL POLISHING PROCESSING DEVICE, AND CORRECTIVE POLISHING PROCESSING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a local polishing processing technique which stabilizes the amount of local polishing processing, which can obtain high corrective spatial resolution, and which is suitable for corrective polishing processing.;SOLUTION: Pressing polishing processing is performed while a polishing processing fluid, in which abrasive grains 81 composed of organic particles with an average particle diameter of 5 μm or more are dispersed in a liquid, is supplied between a workpiece 9 and a workpiece-polishing rotary tool 11 for being locally pressed against the workpiece 9. The rotary tool 11 is made of an elastic material.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2020,JPO&INPIT