MANUFACTURING METHOD OF SURFACE COATED NEAR INFRARED RAY SHIELDING PARTICLE AND SURFACE COATED NEAR INFRARED RAY SHIELDING PARTICLE

摘要

To provide a manufacturing method of a surface coated near infrared ray shielding particle capable of suppressing deterioration phenomenon due to steam or ultraviolet irradiation or the like, and the surface coated near infrared ray shielding particle.SOLUTION: There is provided a manufacturing method of a surface coated near infrared ray shielding particle constituted by a near infrared ray shielding particle (composite tungsten oxide fine particle or boride fine particle) 30 with average particle diameter of 10 to 500 nm, and a coated layer 31 consisting of one or more kind of atom layer selected from AlO, SiO, SiOAl, SiC, SiOC, and SiCN, and coating a surface of the fine particle, in which a coated layer 31 is formed by depositing 4 or more first atom layers with an atom layer deposition device using an atom layer deposition (ALD) method forming the first atom layer by 1 cycle consisting of a first reaction gas adsorption process and a gas discharging process, and a second reaction gas reaction process and a gas discharging process. Since the coated layer 31 is constituted by an atom layer without a pin hall, deterioration phenomenon due to steam, ultraviolet ray irradiation or the like is suppressed.SELECTED DRAWING: Figure 2