Hybrid overlay target design for imaging-based overlay and scatterometry-based overlay

摘要

A design is disclosed for a hybrid overlay target design that includes a target region having both an imaging-based target and a scatterometry-based target. The imaging-based overlay target design may include a parallel lattice structure. Scatterometry-based overlay target designs at different locations within the target area may include on-lattice grating structures. A method of measuring a hybrid overlay target design, and a system having both an imaging optics system and a scatterometry system for measuring a hybrid overlay target design are also disclosed.