Hybrid overlay target design for imaging-based overlays and scatterometry-based overlays

摘要

Designs for hybrid overlay target designs that include a target area having both an imaging based overlay target and a scatterometry based target are disclosed. Imaging-based overlay target designs may include side-by-side grating structures. The scatterometry-based overlay target design at different locations within the target area may include a lattice to lattice structure. Also disclosed is a method and system for measuring a hybrid overlay target design with both an imaging optical system and a scatterometry system for measuring the hybrid overlay target design.