MULTIPLE ELECTRON BEAM DETECTOR, MANUFACTURING METHOD OF MULTIPLE ELECTRON BEAM DETECTOR, AND MULTIPLE ELECTRON BEAM INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a detector capable of corresponding to a deformation of a multiple secondary electron beam while maintaining a high response performance.;SOLUTION: A multiple electron beam detector 222 comprises: a plurality of detection elements 13 and 14 which detect a different one from a plurality of electron beams; a plurality of mount electrodes 15 and 16 mounting a different one from the plurality of detection elements; and a substrate 10 which is formed by a plurality of layers having an exposure surface, arranges one part of the plurality of detection elements onto the exposure surface on an upper layer side of the plurality of layers via each corresponding mount electrode, and arranges one part of the other detection elements onto the exposure surface on the lower layer side from the plurality of layers via each corresponding mount electrode.;SELECTED DRAWING: Figure 4;COPYRIGHT: (C)2020,JPO&INPIT