PHOTORESIST SPECTRAL SENSITIVITY-MATCHING RADIOMETER FOR TRACE/SPACE WIDTH VARIATION IMPROVEMENT

摘要

PROBLEM TO BE SOLVED: To provide a radiometer probe for matching the spectral sensitivity of a dry-film resist.;SOLUTION: The radiometer probe includes a light probe and a filter-diffuser assembly 200 connected to the light probe. The filter-diffuser assembly includes a filter housing 160 configured to receive an optical diffuser 135 positioned on a filter 150. The optical diffuser and the filter are separated by a spacer 140.;SELECTED DRAWING: Figure 1B;COPYRIGHT: (C)2020,JPO&INPIT