NITRIDING TREATMENT APPARATUS AND NITRIDING TREATMENT METHOD

摘要

To provide a nitriding treatment apparatus capable of suppressing a generation of a compound layer by precisely measuring a temperature of a metal component to be nitrided, and a nitriding treatment method.SOLUTION: A nitriding treatment apparatus 1 includes a chamber 10, a gas supply part 50, a turntable 20, a plasma generation part 30, a heater 70, a sheath thermocouple 6, a power supply for a work 41, and a heater control part 804. The sheath thermocouple 6 has a metal sheath 60 and a thermocouple wire 61. The power supply for a work 41 applies a predetermined voltage such that a work W and the metal sheathe 60 are set to a same potential in a negative side. The heater control part 804 controls heat quantity of the heater 70 based on a signal output from the thermocouple wire 61. A temperature of the work W is precisely measured, as the metal sheath 60 of the sheath thermocouple 6 receives a collision of a positive ion like the work W.SELECTED DRAWING: Figure 1