System, lithographic apparatus, and method for reducing oxidation or removing oxide on a substrate support

摘要

Conductive to a substrate support configured to hold the substrate, a conductive or semi-conductive element that contacts the substrate support and covers at least a portion of the substrate support, and a portion of the substrate support that is covered by the conductive or semi-conductive element. Alternatively, a system comprising a charging device configured to apply a positive potential to a semi-conductive element. [Selection diagram]