POINT SPREAD FUNCTION ESTIMATING METHOD AND POINT SPREAD FUNCTION ESTIMATING APPARATUS

摘要

To quickly remove blur using the point spread function when observing a sample.SOLUTION: A point spread function estimation method comprises: an acquisition step S102 for acquiring sample image data which is obtained as a result of imaging a sample S using an optical system, and reference image data which is obtained as a result of imaging an image of a circular opening 19 at the same time as the sample S using the optical system; estimation steps S104, S105 and S106 for estimating the point spread function of the optical system on the basis of the reference image data and ideal image data corresponding to the shape of the opening 19; a generation step S109 for generating output sample image data by deconvoluting the sample image data using the point spread function; and an output step S110 for outputting the point spread function and the output sample image data.SELECTED DRAWING: Figure 5