Pyridinium compound, method for synthesizing the same, metal or metal alloy plating bath containing the pyridinium compound, and method for using the metal or metal alloy plating bath

摘要

The present invention relates to a pyridinium compound, a synthesis method for preparing the same, a metal or metal alloy plating bath containing the pyridinium compound, and a method for using the metal or metal alloy plating bath. Plating baths are particularly suitable for use in filling recessed structures in the electronics and semiconductor industries, including also dual damascene applications.