MEMS mirror mechanism and manufacturing method of MEMS mirror mechanism

摘要

The present invention relates to a MEMS mirror assembly that detects a wide angular range of up to 180 °, preferably up to 160 °, and a method of manufacturing the MEMS mirror assembly. The mirror assembly is a carrier substrate (1), the carrier substrate (1) in which a mirror (2) vibrating about at least one axis is mounted on the carrier substrate (1), and a transparent cover (1). 4), wherein the transparent cover (4) is hermetically sealed and connected to the carrier substrate (1), the transparent cover (4) including an elliptical dome (6) having a substantially circular base region. (4) and an adaptive optics system (8) arranged in a predetermined beam path of the incident beam outside the dome (6). The center of the mirror (2) is at the center point of the dome, and adaptive optics (8) substantially causes the divergence or convergence of the beam caused by the interface of the dome after the beam exits the dome (6). Collimate the incident beam so that it is compensated. The MEMS mirror assembly is formed by joining cover wafers and mirror wafers, each containing a plurality of hemispherical domes and mirrors mounted on a carrier substrate. The mirror assembly is then separated from the joined wafer. The dome of the cover wafer is formed in the process of flowing the glass.