Impurity evaluation method and impurity evaluation program

摘要

PROBLEM TO BE SOLVED: To provide an impurity evaluation method and an impurity evaluation program, capable of accurately attaining relationship between distribution or diffusion behavior for each chemical state of a metal impurity and a structural characteristic of a sample.SOLUTION: An impurity evaluation method includes: a chemical state evaluation step of irradiating a sample measurement region with measurement γ ray, and mapping a chemical state of a metal impurity for each metal component, with a microscopic Moessbauer spectroscopy; a structure observation step of irradiating a measurement region measured in the chemical state evaluation step with electronic ray, and observing a surface or observing an electrically active defect based on electronic ray induced current, with a scanning electron microscopy; and a structure analysis step of irradiating the measurement region measured in the chemical state evaluation step with electron ray, and analyzing crystal orientation or internal distortion distribution, with an electron backscattering diffraction method.SELECTED DRAWING: Figure 13