Optical resonator, optical modulator, optical frequency comb generator, optical oscillator, and method of manufacturing the optical resonator and optical modulator

摘要

PROBLEM TO BE SOLVED: To suppress the chipping and rounding at the time of processing the corners of the end face of a waveguide and to stably adhere the respective reflection films without peeling off at the corners of the uppermost end face of each of the reflection films, thereby making the reflectance of the reflection film and the resonator. Improve the finesse of. SOLUTION: An incident side reflection film 93 and an emission side reflection film 94 are provided so that light incident through the incident side reflection film 93 is resonated and penetrates from the incident side reflection film 93 to the emission side reflection film 94. A waveguide 12 for propagating the resonated light, a substrate 11 for forming the waveguide 12 from the upper surface, a first protective material 86 and a second protective material 87 corresponding to the material of the substrate 11. Of the waveguide 12 so that at least one end face thereof forms the same plane 91, 92 as the first end face 84 and the second end face 85 of the substrate 11 including the light incident end or the light exit end of the waveguide 12. The incident-side reflection film 93 and the emission-side reflection film 94, which are disposed on the upper portion, are formed as single-layer or multilayer vapor-deposition films on flat surfaces 91 and 92 perpendicular to the optical waveguide 12 to be formed. [Selection diagram]