Optical resonator, optical modulator, optical frequency comb generator, optical oscillator, and method for manufacturing optical resonator and optical modulator

摘要

Problem to be solved: to suppress the chipping and the rounding at the time of processing the corners of the waveguide end face, and to stabilize the reflectivity of the reflecting film and the finness of the resonator by being stably deposited without being stripped off at the corners of the top end portion of each reflection film.The reflecting side reflecting film 93 and the emergent side reflection film 94 are formed.The light incident on the incident side reflection film 93 is resonated.A waveguide 12 which is formed so as to pass through the incident side reflection film 93 through the emergent side reflecting film 94 and propagates the resonance lightA substrate 11 for forming the waveguide 12 from the top surfaceThe first protective member 86 and the second protective member 87 corresponding to the material of the substrate 11 are provided.At least one end face of the substrate 11 including a light incident end or a light emitting end in the waveguide 12 and the same plane 91 as the second end face 85 are formedAn upper portion of the waveguide 12 is formed to formThe incident side reflection film 93 and the emergent side reflection film 94 areA plane 91 perpendicular to the optical waveguide92 is formed as a single or multi-layer vapor phase growth film under the temperature conditions lower than the heat resistance of the adhesive.Diagram