PHYSICAL QUANTITY SENSOR, COMPOUND SENSOR, INERTIAL MEASUREMENT UNIT, MOVABLE BODY POSITION MEASURING DEVICE, PORTABLE ELECTRONIC APPARATUS, ELECTRONIC APPARATUS, MOVABLE BODY, TRAVEL SUPPORT SYSTEM, AND DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a physical quantity sensor that has excellent accuracy in detecting a physical quantity, a compound sensor, an inertial measurement unit, a movable body position measuring device, a portable electronic apparatus, an electronic apparatus, a movable body, a travel support system, and a display.;SOLUTION: An acceleration sensor 100 as a physical quantity sensor comprises: an acceleration sensor element 1 that includes a substrate 12, a lid body 50 joined to the substrate 12 to form a storage space S2 therein, and an acceleration sensor element piece 10 stored in the storage space S2 and capable of detecting a physical quantity; and a circuit element 2 that is adhered to a top face 50f of the lid body 50, the surface on the opposite side of the acceleration sensor element piece 10 with an adhesive 131 therebetween. In an outer edge area of the top face 50f of the lid body 50, a concave part 70 is provided along the outer edge of the lid body 50.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2020,JPO&INPIT