PHYSICAL QUANTITY SENSOR, PHYSICAL QUANTITY SENSOR DEVICE, COMPOSITE SENSOR DEVICE, INERTIAL MEASUREMENT DEVICE, MOVING BODY POSITIONING DEVICE, PORTABLE ELECTRONIC APPARATUS, ELECTRONIC APPARATUS AND MOVING BODY

摘要

To provide a physical quantity sensor, a physical quantity sensor device, a composite sensor device, an inertial measurement device, a moving body positioning device, a portable electronic apparatus, an electronic apparatus, and a moving body having excellent detection sensitivity.SOLUTION: The physical quantity sensor includes a substrate, a movable body facing the substrate, a fixed portion fixed to the substrate, and a support beam connecting the movable body and the fixed portion. Further, the movable body is displaceable with the support beam as a rotation axis, and includes in a plan view, a first mass unit located on one side in a second direction with respect to the rotation axis, and a second mass unit located on the other side. Further, the first mass part and the second mass part have a plurality of through-holes which penetrate the movable body and have square opening shape respectively. Further, when C is a damping and Cmin is a minimum value of the damping, C≤1.5×Cmin is satisfied.SELECTED DRAWING: Figure 1