PHYSICAL QUANTITY SENSOR, COMPOSITE SENSOR, INERTIA MEASUREMENT UNIT, MOBILE BODY POSITIONING DEVICE, PORTABLE ELECTRONIC APPARATUS, ELECTRONIC APPARATUS, MOBILE BODY, TRAVEL SUPPORT SYSTEM, DISPLAY DEVICE, AND PHYSICAL QUANTITY SENSOR MANUFACTURING METHOD

摘要

To provide a physical quantity sensor where adhesive property between a sensor element and a circuit element by an adhesive material is improved and a fluctuation of a bias output signal is reduced.SOLUTION: A physical quantity sensor includes: a sensor element including a lid joined with a substrate so as to constitute a housing space inside and a physical quantity sensor element piece housed in the housing space; and a circuit element adhered to an outer surface of the lid via an adhesive material. The lid is provided with electrodes extending: from an inner wall of a through-hole penetrating through between the housing space and a surface on an opposite side, and sealed with a sealing member; to a peripheral edge of the through-hole on the surface on the opposite side. A thickness of an area in the peripheral edge of the electrodes on an opposite side of an opening side is thinner than that on the opening side in a cross-sectional view.SELECTED DRAWING: Figure 1