Foreign matter analysis method, foreign matter analysis program and foreign matter analyzer

摘要

PROBLEM TO BE SOLVED: To provide a method for analyzing a foreign substance, which suppresses the memory usage range of a computing element of a computer for multivariate analysis and enables shortening of the time required for multivariate analysis. SOLUTION: The foreign matter analysis method includes a step (S3) of measuring each spectral spectrum of a plurality of measurement points in a measurement region on a measurement sample using a microscopic differential light device, and spectral data measured using a computer. Step (S4) for calculating the feature amount of the above, step (S5) for determining whether or not each measurement point is on a foreign substance based on the feature amount, and the spectrum of the measurement points determined to be on the foreign substance. The step (S6) of holding the data and deleting or storing the spectral data of the measurement points that are not determined to be on the foreign matter in the storage means, and the spectral data of the plurality of measurement points that are determined to be on the foreign matter. Includes a step (S7) of performing a multivariate analysis or classification using an AI search. [Selection diagram] Fig. 1