Appearance inspection device, appearance inspection method, appearance inspection program, computer-readable storage medium, and recorded device

摘要

PROBLEM TO BE SOLVED: To allow precise visual inspection of a stereoscopic inspection object such as micro needle using image processing.SOLUTION: An average interval between a plurality of projections in an X-axis direction is denoted by L, an average interval in a Y-axis direction by L, a maximum height of an area for visual inspection in height directions of the projections is denoted by H, and a maximum thickness of the projections is denoted by W. When a first optical axis tilt mechanism sets a first optical axis horizontal tilt angle αto be in a range satisfying -Wm*L*sinβcosα-sinα(m*L*cosβ+n*L)W (conditional expression 1)(m, n are any integers), a first lens inclination mechanism 32 sets a first lens vertical tilt angle θ, and a first image pick-up device tilt mechanism 31 sets a first imaging tilt angle θ, respectively to be in a range in which a first optical axis vertical tilt angle θsatisfies (conditional expression 2).SELECTED DRAWING: Figure 3