Damage detection device for double container, damage detection method, and substrate processing device

摘要

PROBLEM TO BE SOLVED: To provide a breakage detection device of a double tube which can detect whether damage occurs in an inner tube or an outer tube.SOLUTION: A breakage detection device detects damage of a double pipe 10 comprising a sealed inner tube 12 and a sealed outer tube 13 which houses the inner tube 12 and has: a pressure sensor 27a which measures a pressure of an interior part of the outer tube 13; a pressurized gas supply part 26a and an electromagnetic on-off valve 28a which adjust the interior part of the outer tube to a first pressure value; a pressure sensor 27b which measures a pressure of an interior part of the inner tube 12; and a pressurized gas supply part 26b and an electromagnetic on-off valve 28b which adjust the interior part of the inner tube 12 to a second pressure value different from the first pressure value.SELECTED DRAWING: Figure 1