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Carrier for double-side polishing apparatus, double-side polishing apparatus, and double-side polishing method
Carrier for double-side polishing apparatus, double-side polishing apparatus, and double-side polishing method
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机译:双面研磨装置用载体,双面研磨装置及双面研磨方法
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摘要
A carrier for a double-side polishing apparatus configured to double-side polish providing a semiconductor silicon wafer. The carrier being disposed between upper and lower turn tables have a polishing pad attached, and includes a holding hole formed to hold the semiconductor silicon wafer between the upper and lower turn tables during polishing. The carrier for a double-side polishing apparatus is made of a resin. An average contact angle with pure water of front and back surfaces of the carrier, which come into contact with the polishing pads, is 45° or more and 60° or less, and a difference in average contact angles between the front surface and the back surface is 5° or less, which provides a carrier for a double-side polishing apparatus capable of enhancing the polishing rate for a semiconductor silicon wafer by using a resinous carrier; and a double-side polishing apparatus and method which employ the carrier.
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