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Polycrystalline silicon crushed lump and method for producing the same
Polycrystalline silicon crushed lump and method for producing the same
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机译:多晶硅碎块及其制造方法
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摘要
PROBLEM TO BE SOLVED: To obtain highly crushed polycrystalline silicon both tungsten and cobalt which inevitably cause contamination due to the material of a destruction tool. SOLUTION: The surface metal concentration is 15.0 pptw or less, preferably 7.0 to 13.0 pptw, and the surface tungsten concentration is 0.9 pptw or less, preferably 0.40 to 0 pptw. A crushed polycrystalline silicon mass having a density of 0.85 pptw and a surface cobalt concentration of 0.3 pptw or less, preferably 0.04 to 0.08 pptw. [Selection diagram] None
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