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High-resolution delta-sigma modulator for measuring electrode displacement of a capacitive sensor
High-resolution delta-sigma modulator for measuring electrode displacement of a capacitive sensor
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机译:用于测量电容传感器电极位移的高分辨率delta-sigma调制器
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摘要
A single plate capacitance sensor includes a sensor capacitor and a reference capacitor that share common plate. A capacitance-to-digital sigma delta modulator provides separate sensor excitation and reference excitation signals to the sensor capacitor and the reference capacitor to provide high resolution detection. Programmable ratio-metric excitation voltages and adaptive excitation voltage sources can be used to enhance modulator performance.
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