The target supply device according to an aspect of the present disclosure includes a vibration element that generates a droplet by applying vibration to a target material output from the nozzle 80, a droplet detection unit that detects the droplet, and a control unit 70. Is provided. In the control unit 70, a first detection threshold value and a second detection threshold value to be compared with the detection signal from the droplet detection unit are set. The first detection threshold is used to generate a laser light emission trigger. The absolute value of the second detection threshold from the baseline of the detection signal is smaller than that of the first detection threshold. The control unit 70 calculates an evaluation parameter related to the satellite based on the detection signal and the second detection threshold, and determines a duty value of the electric signal suitable for the operation of the vibrating element based on the evaluation parameter.
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