Capacitance type height sensor, laser processing nozzle using the same, and laser processing apparatus

摘要

The capacitance type height sensor (10) supplies a voltage signal to the sensor electrode (11) attached to the tip of the laser processing nozzle (1) and the sensor electrode (11), and outputs from the sensor electrode (11). A signal processing unit (13) that detects a signal and measures the distance between the tip of the sensor electrode (11) and the workpiece (5) electrically connected to the ground, the sensor electrode (11), and the signal processing unit. And a cable (12) for electrically connecting with (13). The signal processing unit (13) has a disconnection determination unit that determines that the cable (12) is disconnected when the signal from the sensor electrode (11) is a predetermined value or more.