BACKGROUND ELIMINATION METHOD AND X-RAY FLUORESCENCE SPECTROMETER

摘要

To estimate accurate background intensity and perform accurate microanalysis even when a background shape near a peak is curved.SOLUTION: With respect to a secondary X-ray generated from a preliminary sample, the present invention acquires three preliminary intensities at a peak angle corresponding to an analysis element and a first and a second background angle, calculates two kinds of background rejection coefficient on the basis of the three preliminary intensities in accordance with a presumption that the shape of a background profile is constituted from an element whose shape is analogous between samples, an element whose intensity is constant at angles and two background elements, irradiates an analysis sample with a primary X-ray and obtains three analytical intensities of a secondary X-ray at the peak angle and the first and second background angles, and subtracts the background intensity at the peak angle having been calculated from the two kinds of background rejection coefficient and the analytical intensity at the first and second background angles from the analytical intensity at the peak angle.SELECTED DRAWING: Figure 3