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Negative photoresist composition for KRF laser, having high resolution and high aspect ratio
Negative photoresist composition for KRF laser, having high resolution and high aspect ratio
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机译:具有高分辨率和高纵横比的用于KRF激光器的负性光刻胶组合物
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摘要
Disclosed is a negative photoresist composition for a KrF laser, having high resolution and a high aspect ratio and, more particularly, a negative photoresist composition for a KrF laser, which includes a specific additive in order to improve the properties of a conventional negative photoresist, whereby the negative photoresist composition can prevent fine-pattern collapse even using a short-wavelength exposure light source, compared to conventional negative photoresists, and can also exhibit high resolution and a high aspect ratio and is thus suitable for use in semiconductor processing.
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