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Proton radiation as a tool for selective degradation and physics based device model test and calibration
Proton radiation as a tool for selective degradation and physics based device model test and calibration
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机译:质子辐射作为选择性降解和基于物理的设备模型测试和校准的工具
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摘要
A method of evaluating localized degradation of a III-V compound semiconductor. The method includes preparing first and second III-V compound semiconductors. The second III-V compound semiconductor that is similar to the first III-V compound semiconductor and further comprises a shield layer that is configured to alter exposed portions of channels of the second III-V compound semiconductor. The first and second III-V compound semiconductors and irradiated and then electrically tested. Results of the electrical testing of the first and second III-V compound semiconductors are compared.
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