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Vertical hall-effect sensor for detecting two-dimensional in-plane magnetic fields
Vertical hall-effect sensor for detecting two-dimensional in-plane magnetic fields
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机译:垂直霍尔效应传感器,用于检测二维面内磁场
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摘要
A microelectronic device includes a vertical Hall sensor for measuring magnetic fields in two dimensions. In one implementation, the disclosed microelectronic device involves a vertical Hall plate with a cross-shaped upper terminal and a lower terminal which includes a buried layer. The cross-shaped upper terminal has a length-to-width ratio of 5 to 12 where it contacts the vertical Hall plate. The length is measured from one end of one arm of the cross-shaped upper terminal to an opposite end of an opposite arm. The width is an average width of both arms. Hall sense taps are located outside of the cross-shaped upper terminal. Current returns connect to the buried layer.
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