One-time-programmable memory in a high-density three-dimensional structure

摘要

Semiconductor memory devices and methods for manufacturing semiconductor memory devices are provided herein, An example method includes forming a first silicon layer on a bottom conductive layer, transforming the first silicon layer into a first polysilicon layer, forming a second silicon layer stacked on the first polysilicon layer, and a third silicon layer stacked on the second silicon layer, transforming the second and third silicon layers into second and third polysilicon layers, forming an amorphous silicon layer on the third polysilicon layer, forming the amorphous silicon layer into a silicide layer on at least a portion of the third polysilicon layer, depositing an oxide onto at least a portion of the first, second, and third polysilicon layers, selectively trimming the silicide layer, and forming a top conductive layer on at least a portion of the trimmed silicide layer.