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Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching
Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching
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机译:具有变压器耦合电容调谐开关的变压器耦合等离子体脉冲的系统和方法
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摘要
A substrate processing system includes a processing chamber including a substrate support to support a substrate. A coil is arranged around the processing chamber. A first RF source provides first RF power at a first magnitude and a first frequency. A first pulsing circuit applies a duty cycle to the first RF source. A tuning circuit receives an output of the first pulsing circuit, includes a first variable capacitor, and has an output in communication with the coil to generate plasma in the processing chamber. A controller includes a data acquisition module to generate feedback. A feedback control module controls at least one of the first frequency and the first variable capacitor based on the feedback and a gain value. The controller selects the gain value based on at least one of the first frequency and the duty cycle.
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