Plasma-Chemical Synthesis of Oxide Powders Using Transformer-Coupled Discharge

摘要

An experimental investigation of transformer-coupled discharge in an Ar-O_2 mixture with the addition of SiCl_4 , TiCl 4 and ZrCl_4 has been carried out under the atmospheric pressure of plasma-forming gases. Discharge power and discharge heat losses have been determined, and the dispersion and phase composition of reaction products (oxide powders) has been analyzed with SEM and X-ray diffraction analysis. Investigations reveal the formation of ultrafine oxide powders in the case of vaporized chloride (SiCl_4 and TiCl_4 ) injecting into the transformer coupled discharge. In the case of fine powder (ZrCl_4 ) injection, full oxidation was not observed and reaction products consisted of a mixture of ZrO_2 and ZrOCl_2 . A conclusion has been made regarding the perspectives of using transformer-coupled discharge to produce ultrafine oxide powders.