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Integrated quartz MEMS tuning fork resonator/oscillator

机译:集成石英MEMS音叉谐振器/振荡器

摘要

A piezoelectric quartz tuning fork resonator having a pair of tines formed from a common quartz plate, with a middle electrode and two outer electrodes being disposed at or on top and bottom surfaces of each of the pair of tines and interconnected such that the outer electrodes at or on the top and bottom surfaces of a first one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of a second one of the pair of tines and further interconnected such that the outer electrodes at or on the top and bottom surfaces of the second one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of the first one of the pair of tines.
机译:一种压电石英音叉谐振器,具有一对由共同的石英板形成的尖齿,中间电极和两个外部电极设置在该对尖齿中的每一个的上表面或下表面或上表面和下表面,并且相互连接,使得外电极位于所述一对尖齿中的第一个尖齿的顶表面或底表面上的或与所述一对尖齿中的第二个尖齿的顶表面和底表面上的中间电极共同连接,并进一步互连,以使位于或之上的外部电极一对尖齿中的第二个的顶面和底面与一对尖齿中的第一个的顶面和底面的中间电极共同连接。

著录项

  • 公开/公告号US10581402B1

    专利类型

  • 公开/公告日2020-03-03

    原文格式PDF

  • 申请/专利权人 HRL LABORATORIES LLC.;

    申请/专利号US201816102469

  • 发明设计人 RANDALL L. KUBENA;

    申请日2018-08-13

  • 分类号H03H9/215;H03H9/05;H03H9/13;H01L41/047;H01L41/053;H03H3/02;H03H9/125;

  • 国家 US

  • 入库时间 2022-08-21 11:26:34

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