METHOD OF OPERATING SCANNING THERMAL MICROSCOPY PROBE FOR QUANTITATIVE MAPPING OF THERMAL CONDUCTIVITY

摘要

A method of operating a scanning thermal microscopy probe to model thermal contact resistance at an interface between a sample and a tip of the probe includes providing a sample to be measured; providing a scanning thermal microscopy probe including a tip; contacting the sample to be measured with the tip; and determining, with a model, a thermal conductivity (k) of the sample from a probe current (I) of the scanning thermal microscopy probe.