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Silicon Photonic Tunable Device with Thermo-Optic Channel
Silicon Photonic Tunable Device with Thermo-Optic Channel
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机译:具有热光通道的硅光子可调器件
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摘要
A silicon photonic device is provided including a substrate; a passive silicon optical device, on the substrate; an electrically insulating cladding layer that encapsulates the optical device on the substrate, the cladding layer including a trench patterned therein, so as for the trench to at least partly cover the optical device, on a side of the latter, the trench filled with an electrically insulating, thermally conducting material, having a refractive index that is lower than a refractive index of silicon, thereby forming a heat conduction channel toward the optical device; and a heating element, in contact with the thermally conducting material. A method of operating such silicon photonic devices is also provided.
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