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Semiconductor Chips and Systems Having Phase-Change Material (PCM) Switches Integrated with Micro-Electrical-Mechanical Systems (MEMS) and/or Resonators
Semiconductor Chips and Systems Having Phase-Change Material (PCM) Switches Integrated with Micro-Electrical-Mechanical Systems (MEMS) and/or Resonators
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机译:具有相变材料(PCM)开关与微机电系统(MEMS)和/或谐振器集成在一起的半导体芯片和系统
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摘要
A semiconductor chip or system, such as a multi-chip module (MCM), a system-in-package (SiP), and/or a printed circuit board (PCB) module, includes a substrate, a resonator and/or a micro-electrical-mechanical system (MEMS), and a phase-change material (PCM) switch. The PCM switch includes a heating element, a PCM situated over the heating element, and PCM contacts connected to passive segments of the PCM. The heating element is transverse to the PCM and approximately defines an active segment of the PCM. The PCM contacts are electrically connected to the resonator and/or the MEMS in a shared routing region of the semiconductor chip. The PCM switch is configured to engage or disengage the resonator and/or the MEMS. In one approach, a plurality of PCM switches are capable of reconfiguring an array of resonators and/or an array of MEMS. In another approach, a redundant PCM switch is electrically connected to a redundant resonator and/or a redundant MEMS.
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