Switchable 2-port Aluminum Nitride MEMS resonator using monolithically integrated 3.6 THz cut-off frequency phase-change switches

机译：使用单片集成3.6 THz截止频率相变开关的可切换2端口氮化铝MEMS谐振器

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摘要

This work presents the first experimental demonstration of an intrinsically switchable Aluminum Nitride (AlN) 2-port MEMS resonator using 3 monolithically integrated chalcogenide phase change material (PCM) switches.

机译：这项工作展示了使用3个单片集成硫族化物相变材料（PCM）开关的可本质切换的氮化铝（AlN）2端口MEMS谐振器的首次实验演示。

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来源
《2015 Joint Conference of the IEEE International Frequency Control Symposium amp; European Frequency and Time Forum》|2015年|706-708|共3页
会议地点 Denver CO(US)
作者
Hummel Gwendolyn; Rinaldi Matteo;
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作者单位

Electr. Comput. Eng., Northeastern Univ., Boston, MA, USA;

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原文格式 PDF
正文语种 eng
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关键词
aluminum nitride resonators; phase change materials; piezoelectric resonators; reconfigurable resonators;

机译：氮化铝谐振器;相变材料;压电谐振器;可重构谐振器;
入库时间 2022-08-26 14:08:28

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专利

1. MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters [J] . Nordquist Christopher D., Branch Darren W., Pluym Tammy, Journal of Micromechanics and Microengineering . 2016,第10期

机译：用于可切换和可重构射频滤波器的轮廓模式氮化铝谐振器的MEMS切换
2. Dual-beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonators [J] . Rashed Mahameed, Nipun Sinha, Marcelo B. Pisani, Journal of Micromechanics and Microengineering . 2008,第10期

机译：与AlN轮廓模式谐振器单片集成的压电AlN RF MEMS开关的双光束驱动
3. Beam Switching Reflectarray Monolithically Integrated With RF MEMS Switches [J] . Bayraktar O., Civi O. A., Akin T. Antennas and Propagation, IEEE Transactions on . 2012,第2期

机译：与RF MEMS开关单片集成的光束开关Reflectarray
4. Switchable 2-port Aluminum Nitride MEMS resonator using monolithically integrated 3.6 THz cut-off frequency phase-change switches [C] . Hummel G., Rinaldi M. IEEE International Frequency Control Symposium . 2015

机译：可切换的2端口氮化铝MEMS使用单片集成3.6 THz切断频率相变开关的谐振器
5. Monolithic integration of phase change materials and aluminum nitride contour-mode mems resonators for highly reconfigurable radio frequency systems. [D] . Hummel, Gwendolyn Eve. 2015

机译：相变材料和氮化铝轮廓模式记忆谐振器的单片集成，用于高度可重构的射频系统。
6. Integrated monolithic 3D MEMS scanner for switchable real time vertical/horizontal cross-sectional imaging [O] . Haijun Li, Xiyu Duan, Zhen Qiu, -1

机译：集成的单片3D MEMS扫描仪可切换实时垂直/水平横截面成像
7. Dual-Beam Actuation of Piezoelectric AlN RF MEMS Switches Monolithically Integrated with AlN Contour-Mode Resonators [O] . Mahameed, Rashed, Sinha, Nipun, Pisani, Marcelo B, 2008

机译：与AlN轮廓模式谐振器单片集成的压电AlN RF MEMS开关的双光束驱动

Switchable 2-port Aluminum Nitride MEMS resonator using monolithically integrated 3.6 THz cut-off frequency phase-change switches

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