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HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER WITH ELECTROSTATIC CONTROL OF PROOF MASS
HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER WITH ELECTROSTATIC CONTROL OF PROOF MASS
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机译:静电质量控制静电的高性能微机电系统
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摘要
There is provided a resonant sensor comprising: a substrate; a proof mass suspended from the substrate to allow for relative movement between the proof mass and the substrate along at least one sensitive axis; at least one resonant element coupled to the proof mass; an electrode assembly adjacent to the at least one resonant element; drive and sense circuitry connected to the electrode assembly configured to drive the electrode assembly to cause the at least one resonant element to resonate, wherein a measure of acceleration of the proof mass can be determined from changes in the resonant behavior of the at least one resonant element; at least one substrate electrode on the substrate, adjacent to the proof mass; and electric circuitry connected to the substrate electrode configured to apply a voltage to the substrate electrode providing an electrostatic force on the proof mass. The substrate electrode may be used to provide a number of different functions.
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