SCANNING MICROWAVE ELLIPSOMETER AND PERFORMING SCANNING MICROWAVE ELLIPSOMETRY

摘要

A scanning microwave ellipsometer includes: a microwave ellipsometry test head including: a polarization controller; a transmission line; and a sensor that produces sensor microwave radiation, subjects a sample to the sensor microwave radiation, receives a sample reflected microwave radiation from the sample that results from subjecting the sample with the sample reflected microwave radiation, and produces a sensor-received microwave radiation from the sample reflected microwave radiation, wherein a polarization of the sensor microwave radiation is controlled by the polarization controller; an electrical signal measurement system that produces an electrical readout signal such that a magnitude of reflection coefficient Γ and an angle of reflection coefficient Γ of the sample reflected microwave radiation is determined from the electrical readout signal; and a position controller that adjusts a relative position of the sensor and the sample.