首页> 外国专利> CORE WIRE FOR USE IN SILICON DEPOSITION, METHOD FOR PRODUCING SAID CORE WIRE, AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON

CORE WIRE FOR USE IN SILICON DEPOSITION, METHOD FOR PRODUCING SAID CORE WIRE, AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON

机译:硅沉积中使用的芯线,制备芯线的方法以及多晶硅的制备方法

摘要

Efficiency of producing polycrystalline silicon is improved. A silicon filament (11) is constituted by a rod-shaped member made of polycrystalline silicon. The polycrystalline silicon has an interstitial oxygen concentration of not less than 10 ppma and not more than 40 ppma. On a side surface, in a lengthwise direction, of the rod-shaped member, crystal grains each having a crystal grain size of not less than 1 mm are observed.
机译:提高了多晶硅的生产效率。硅丝( 11 )由多晶硅制成的棒状构件构成。多晶硅的间隙氧浓度为10ppma以上且40ppma以下。在棒状构件的长度方向的侧面上,观察到晶粒大小均不少于1mm的晶粒。

著录项

  • 公开/公告号US2020002178A1

    专利类型

  • 公开/公告日2020-01-02

    原文格式PDF

  • 申请/专利权人 TOKUYAMA CORPORATION;

    申请/专利号US201816484065

  • 发明设计人 MASAYOSHI NISHIKAWA;YUJI INOUE;

    申请日2018-02-14

  • 分类号C01B33/035;C23C16/24;

  • 国家 US

  • 入库时间 2022-08-21 11:21:09

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