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CORE WIRE FOR USE IN SILICON DEPOSITION, METHOD FOR PRODUCING SAID CORE WIRE, AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON
CORE WIRE FOR USE IN SILICON DEPOSITION, METHOD FOR PRODUCING SAID CORE WIRE, AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON
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机译:硅沉积中使用的芯线,制备芯线的方法以及多晶硅的制备方法
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摘要
Efficiency of producing polycrystalline silicon is improved. A silicon filament (11) is constituted by a rod-shaped member made of polycrystalline silicon. The polycrystalline silicon has an interstitial oxygen concentration of not less than 10 ppma and not more than 40 ppma. On a side surface, in a lengthwise direction, of the rod-shaped member, crystal grains each having a crystal grain size of not less than 1 mm are observed.
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