Digital Projection System for the Development of Photolithography Devices

摘要

A novel digital projection system, used to build multi-dimensional structures by the process of photolithography, is presented herein. An exemplary embodiment of the digital projection system describes a process by which multi-dimensional structures are constructed using a layer or series of layers of polymerized light sensitive material. Attributes of this digital projection system offer several enhancements over traditional approaches. The use of the digitally projected images and light sensitive material both eliminates the need for single-use masks and moves the process outside of traditional fabrication environment. Further, through the use of various optic systems, digitally projected images can be scaled to accommodate the construction of multi-dimensional structures spanning the spatial ranges of devices employing the photolithography process and permits for numerous application specific embodiments of the digital projection system described herein.