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Development of Photolithography System with Liquid Crystal Device as Active Mask for Synthesizing DNA Chips

机译：用液晶装置作为合成DNA芯片的活性掩模的光刻系统的研制

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Takayuki SHIBATA; Terutake HAYASHI; Takayuki NODA; Toru MASUZAWA; Eiji MAKINO;
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年度 2004
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1. Development of Photolithography Process for Printed Circuit Board Using Liquid Crystal Mask in Place of Photomask [J] . Min Sup Oh, Jae Hong Lee, Chinsoo Hong, Japanese journal of applied physics . 2012,第9ISSUE3期

机译：用液晶掩模代替光掩模开发印刷电路板的光刻工艺
2. Switchable liquid-crystal phase-shift mask for super-resolution photolithography based on Pancharatnam-Berry phase [J] . Nikolaus Glazar, Christopher Culbreath, Yannian Li, Applied physics express . 2015,第11期

机译：基于Pancharatnam-Berry相的可切换液晶相移掩模，用于超分辨率光刻
3. Photolithography of thick photoresist coating for electrically controlled liquid crystal photonic bandgap fibre devices [J] . L. Wei, E. Khomtchenko, T.T. Alkeskjold, Electronicsletters . 2009,第6期

机译：电控液晶光子带隙光纤器件厚光刻胶涂层的光刻
4. SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography: Toward future mass production of photonic crystal nanocavity devices [C] . Nurul Ashikin Binti Daud, Yuta Ooka, Tomohisa Tabata, Conference on Lasers and Electro-Optics Pacific Rim . 2017

机译：用光刻技术制备的SiO 2 包覆有源和无源光子晶体纳米腔器件：走向未来光子晶体纳米腔器件的批量生产
5. Electro-optical properties of cholesteric liquid crystal devices and applications of dual frequency cholesteric liquid crystals. [D] . Xu, Ming. 2000

机译：胆甾型液晶器件的电光特性和双频胆甾型液晶的应用。
6. Effect of additives on the growth of HKUST-1 crystals synthesized by microfluidic chips with concentration gradient [O] . Qirui Wu, Xiaohong Wang, Jinfeng Liu, 2020

机译：添加剂对微流体芯片合成的HKUST-1晶体生长的影响浓度梯度
7. 3SP5-01 Self-assembly of large planar DNA crystal(3SP5 Development of dynamic molecular systems sharing the characteristics with living systems : from supra-molecular devices to bio-reorganizing machines,The 47th Annual Meeting of the Biophysical Society of Japan) [O] . Satoshi Murata 2009

机译：3SP5-01大平面DNA晶体的自组装（3SP5发育动态分子系统，与生活系统的特点分享：从Supra分子装置到生物重组机器，日本生物物理学会第47次年会）

Development of Photolithography System with Liquid Crystal Device as Active Mask for Synthesizing DNA Chips

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